High‐Quality Femtosecond Laser Surface Micro/Nano‐Structuring Assisted by A Thin Frost Layer

نویسندگان

چکیده

Abstract Femtosecond laser ablation has been demonstrated to be a versatile tool produce micro/nanoscale features with high precision and accuracy. However, the use of fluence increase efficiency usually results in unwanted effects, such as redeposition debris, formation recast layer, heat‐affected zone or around craters. Here this limitation is circumvented by exploiting thin frost layer thickness tens microns, which can directly formed condensation water vapor from air onto exposed surface whose temperature below freezing point. When femtosecond beam focused target covered only local laser‐irradiated spot melts into water, helping boost efficiency, suppress reduce heat‐affect zone, while remaining prevent debris adhering surface. By frost‐assisted strategy, high‐quality micro/nano‐structures are successfully achieved on both plane curved surfaces at fluences, mechanism behind high‐spatial‐frequency (HSF) laser‐induced periodic structures (LIPSSs) silicon discussed.

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ژورنال

عنوان ژورنال: Advanced Materials Interfaces

سال: 2023

ISSN: ['2196-7350']

DOI: https://doi.org/10.1002/admi.202201924